Secondary Electron Imaging in the Helium Ion Microscope
نویسندگان
چکیده
Secondary electrons (SE) have been for many years the most user friendly, versatile, and convenient modes of imaging in the scanning electron microscope. The Helium Ion Microscope (HIM) also generates secondary electrons (iSE) and potentially offers significant advantages compared to the conventional SEM including much enhanced spatial resolution and improved image contrast. There are, however, both similarities and important differences between the properties of SE and iSE signals which must be taken into account to optimize imaging.
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